An ultra-compact (DWR series) deionized water recycling unit for use with dicing saws
Advantage of using DWR: x10
7. Easy Relocation
Easy to Relocate with Dicing Saws
Large amounts of deionized water are used In Si wafer dicing. Therefore, when dicing saws are relocated between factories, a deionized water supply environment must also be prepared.
Deionized water plants are typically large and cannot be relocated. If only the equipment is relocated (e.g. deionized water manufacturing machines and filtration machines), deionized supply/drainage collection pipes and collection water tanks must be newly installed, making it difficult to reduce costs.
In contrast, the DWR series can be relocated with the dicing saws to not only domestic locations, but overseas locations as well due to their small size, achieving processing using deionized water with the same quality as before relocation. Starting up and shutting down the equipment can be done within 12 to 24 hours by simply draining the water and exchanging the filter.
Freedom of Installation within Factories
The DWR series recycles almost 100% of the cutting water drainage from the dicing saws and does not generate any cutting water. Therefore, pipes for returning the drainage to a deionized water plant are not required. Furthermore, because the deionized water supply environment can be built separately and only dicing saws and a DWR unit are required, it is possible to place dicing saws in locations where it was previously difficult to supply deionized water.
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