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SECS/GEM Communication Specification

  • The downloading service on this website ended at the end of October 2019.
  • To download the SECS/GEM Communication Specification Manual from now on, please use the "Manual Downloads" service on the DISCO website. Not only the SECS/GEM Communication Specification Manual, but the manuals of DISCO's equipment (except for some equipment) can be downloaded on "Manual Downloads".
    Manual Downloads
  • We apologize to the customer who has an account of "SECS/GEM Communication Specification Manual Downloads" for the inconvenience. You cannot login to "Manual Downloads" with your current user account. If you do not have an account for "Manual Downloads", please access to the website above to register on the "Initial User Registration", and obtain a new ID and password.
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