The ZHFX Series employs a bond that has ideal wear properties for processing newly developed oxide wafers. It is capable of continuously processing oxide wafers, which has been difficult thus far, with a high level with stability. In addition, greater processing stability can be expected in the DBG processing of Lithium Tantalite wafers.
Realizes high level and stable processing of oxide wafers
Significantly lowers dress frequency during processing and shows high continuous processing performance.
For the detailed specification and functions, view our catalogues.